Used KLA / TENCOR / THERMA-WAVE TP 500 #293699103 for sale

ID: 293699103
Ion implanter.
KLA / TENCOR / THERMA-WAVE TP 500 is a state-of-the-art wafer testing and metrology equipment. It is designed to perform electrical and optical tests on semiconductor wafers and integrated circuits. It provides an integrated platform for wafer test services, including wafer probing, on-wafer parametric testing, sorting and programming. It also offers advanced metrology capabilities for wafer dimensional measurements, including wafer shape, flatness and edge profile. KLA TP 500 has a high-speed wafer prober system that is capable of measuring a variety of parametric data, including Vt, Ioff, dielectric breakdown, flatness, breakpoint, wafer parameter distribution, and leakage current. It can also perform monitoring of off-specification substrates. TENCOR TP-500 is capable of handling wafers up to 200mm in size and has five selectable prober heads. This provides a maximum test speed of 40MHz. The prober has an internal data interface which enables quick and easy data transfer to a host computer. TP 500's metrology capabilities include the measurement of wafer shape, flatness and edge profile. It uses laser interferometry and a closed-loop digital microscopy unit for measuring wafer shape. It also utilizes KLA Interferometry Metrologer (TIM) for flatness, edge profile, spin uniformity, and other types of dimensional measurements. THERMA-WAVE TP-500 also offers an environment analyzer that can template a wafer for secondary instrumentation. It reads die sizes, sorts out dies, measurements stimuli and parameters, and screens for defects. THERMA-WAVE TP 500 has an impeccable track record of reliability and accuracy. Its on-board data systems monitor machine performance and alert the operator when a fault is detected. It also has a self-diagnostic tool built-in which allows for quick identification and remedy of any issues. Overall, KLA / TENCOR / THERMA-WAVE TP-500 is an state-of-the-art wafer testing and metrology asset that provides a reliable and accurate platform for testing a variety of semiconductor wafers and integrated circuits. It offers a high speed prober, along with advanced metrology capabilities which enable detailed testing and tracking of substrate parameters.
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