Used KLA / TENCOR / THERMA-WAVE TP 500 #293823526 for sale

KLA / TENCOR / THERMA-WAVE TP 500 is an advanced wafer testing and metrology equipment used for semiconductor process development and failure analysis. The system provides automated top-surface and cross-sectional analysis of wafers or die at a high level of resolution and accuracy. KLA TP 500 utilizes thermography to measure the electrical properties of wafer surfaces without the need for destructive contact or optical microscopy. This process helps identify damage and defects within minuscule size features. The unit is also capable of performing die and wafer-level flatness measurements using non-contact sensors, which can detect variations in topography of up to 0.3 nm. For die analysis, TENCOR TP-500 offers automatic die-location capabilities with both manual and automated die address transitions, to easily move from one location to the next. The machine incorporates an XY-stage of 45x45mm or 90x90mm, providing comprehensive mapping for wafer analysis. The tool also features high-resolution imaging, with a depth of field of up to 0.5 µm, digital image capture, automatic die selection, and imprint detector technology. Its image analysis tools include advanced particle counting, critical dimension measurement, and electrical signature analysis. TP 500 can generate a variety of metrology reports in various formats such as combined summary, failure mechanism analysis, pass/fail and topographical reports. The asset also enables check mapping of critical parameters such as thresholds, flatness, connectivity, and die-to-die repeatability. In addition, the model features an intuitive, user-friendly interface and allows for remote equipment diagnosis and repair. It is designed to meet RoHS compliance and offers high-speed sampling at a throughput rate of up to 120 wafers per hour. THERMA-WAVE TP-500 is a top-of-the-line wafer testing and metrology system for demanding semiconductor processes.