Used KLA / TENCOR / THERMA-WAVE TP 630XP #293759749 for sale

KLA / TENCOR / THERMA-WAVE TP 630XP is a multi-function wafer testing and metrology equipment designed for high-accuracy and high-speed metrology applications. The system features high-performance optics and high-quality imaging for analysis and measurement of samples. It is equipped with a fast and reliable AutoFocus unit, as well as a unique In-Sight algorithm to quickly analyze complex device structures from large wafers. KLA TP 630XP uses an automated stage for high-efficiency sample scanning, and offers three speeds to achieve the best speed and accuracy for both metrology and characterization applications. With a maximum step size of 2.5 um, TENCOR TP 630XP can measure circuit features down to sub micron levels. The FP 630XP also provides three illumination selections for different test requirements. These include white light, polarized light and darkfield illumination. TP 630XP features a high resolution CCD camera with selectable resolutions from 550 x 570 to 3,424 x 2,656 pixels. The camera's image processing software can analyze data from entire wafers with great accuracy. The machine also supports a wide range of sample preparation materials, allowing for wafer thinning, hinge probing, and etching prior to testing. THERMA-WAVE TP 630XP also offers advanced metrology capabilities, allowing for high-precision measurement of height, tilt, corner, and edge radius, as well as other micro-features, to perform defect review and analysis. In addition, the advanced software package includes image processing tools for automatic device recognition, wafer overlay and overlay measurements, and critical dimension measurements. KLA / TENCOR / THERMA-WAVE TP 630XP is certified for wafer-level fabrication, as well as automated metrology for monitoring litho-etch processes. The tool is compatible with a variety of industry standard plasma etch and descum processes. With its comprehensive features, KLA TP 630XP is designed to improve wafer level metrology, reduce costs, and increase production yields.