Used LEITZ LIS #9283430 for sale

ID: 9283430
Wafer inspection system.
LEITZ LIS (Laser-Enhanced Image Metrology equipment) is a wafer testing and metrology system used to analyse the surface of semiconductor chips or wafers at a micro or nanometer scale. The unit provides a powerful, sophisticated, and accurate analysis of the shape, structure, and functionality of highly complex semiconductor devices, and can perform a variety of measurements including detecting and characterising surface topography, texture, surface contamination, defects, and overlay accuracy. LIS is based on the combination of optical confocal microscopy with laser interferencing as the main sensors. The confocal microscope makes use of a high-resolution laser beam to scan the wafer surface at resolutions up to 0.2µm/pixel. The laser interference and shearing techniques employed use two laser beams to measure the relative height of the surface. The machine employs high-speed image processing algorithms to calculate three-dimensional (3D) surface morphologies and derive critical parameters such as surface profile, step heights, junction depth, and overlay accuracy. The tool's analysis capabilities can be extended using customised modules for specific applications. These modules enable users to measure different parameters, such as surface roughness, surface defect classifications, particle detection, or resistivity analysis. LEITZ LIS asset also features powerful software for collecting, displaying, and analysing real-time data. The intuitive user-interface provides a range of advanced analytical options and the ability to export and store data for later review and comparison. Furthermore, users can access the model remotely from any computer, enabling them to monitor and control their analysis from any location. LIS is a highly versatile and reliable equipment used in many research, development, and production applications. With its high image resolution and accurate 3D measurements, the system enables users to analyse intricate micro and nanometer scale features with ease and precision. This makes it the ideal tool for characterising and verifying the quality of modern semiconductor devices.
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