Used VEECO / SLOAN DEKTAK 150 #293665803 for sale

ID: 293665803
Surface profiler, parts system.
VEECO / SLOAN DEKTAK 150 is a wafer testing and metrology equipment used for measuring topography and thickness of semiconductors with a high degree of accuracy and precision. This system features a unique ID tracking unit allowing users to locate previously analyzed wafers, as well as an integrated autofocus machine for precise alignment of the wafer with the probe and a three-axis stage for positioning the wafer during testing. Additionally, VEECO DEKTAK 150 is capable of measuring wafers up to 6" in diameter and presents a wafer within 0.5µm of the target positioning. SLOAN DEKTAK 150 is a non-destructive testing tool that utilizes a vertical stylus backed by a Spring Load Positioner (SLP) that utilizes feedback from a position sensing laser interferometer (PSI) that allows the measurement of wafer topology. Coupled with dynamic range tracking, DEKTAK 150 is capable of utilizing the full range of the stylus travel at any given range, maintaining the tip-to-sample alignment while measuring. The SLP asset is also employed to measure the wafer's thickness. This is done by using the Z servocontrol loop, which operates by controlling the force of the vertical stylus. By setting the desired force, the vertical stylus remains in the same physical position as the force applied is adjusted. As the force is lowered, the stylus is allowed to approach higher elevations of the wafer, thus allowing the measurement of the wafer's thickness. VEECO / SLOAN DEKTAK 150 is also capable of providing anomalous particle detection as the wafer is being measured. In this mode, the 3-axis stage is slowly moved across the wafer as the stylus continues to measure the topography. Any object of elevated height detected by the stylus is logged into the model and can be analyzed further. VEECO DEKTAK 150 also features a suite of programs to further utilize and simplify its usage. Among them is the Feature Analysis Program, which offers a comprehensive set of features used to define, analyze, and compare variations in wafer topology. Once defined, features are iteratively processed and categorized for further statistic and graphical analysis. SLOAN DEKTAK 150 is an invaluable tool used by semiconductor device manufacturers, helping them develop, optimize, and diagnose their production. Its high-precision measurements and versatile set of features make it a valuable asset for anyone interested in wafer testing and metrology.
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