Used VEECO / SLOAN DEKTAK 3030 #293600243 for sale

VEECO / SLOAN DEKTAK 3030 is an advanced wafer testing and metrology equipment used to measure wafer surface flatness, film thickness and other critical wafer parameters. As a technically advanced testing and metrology system, VEECO DEKTAK 3030 provides high-accuracy results for a wide range of parameters, including film thickness, surface reflectance, spectral emission, surface roughness, and topography. The DEKTAK unit is based on a modular design that allows for multiple configurations. It consists of an x-y stage, a z-axis motion module, a sample interface module, and a z-axis sample manipulation module. The x-y stage is a two-axis, high-speed, precision stage with up to 12 micro-inch resolution and 16 to 100 nanometer accuracy accuracy. This stage is driven by a micrometer-controlled drive machine that offers smooth performance and substantial load capacity. The z-axis motion module is constructed from a ferrofluid sealed slide and can move in increments of 10 seconds of arc. This module increases the tool's measurement accuracy by allowing for sample manipulation in three dimensions. The sample interface module can be used with a variety of sample holders and facilitates the accurate loading of samples onto SLOAN DEKTAK 3030. It includes a vacuum asset that allows for the handling of samples of varying sizes and shapes. Finally, the z-axis sample manipulation module enables precise control of the sample's position during testing. This module includes a sophisticated multi-axis linear actuator, force and torque sensors, and a soft-start feature. The testing capabilities of DEKTAK 3030 include a wide range of wafer parameters, such as film thickness, surface reflectance, spectral emission, surface roughness, and topography. The model is capable of measuring detailed pattern roughness profiles and pore spacing, as well as total average long range roughness (TRL) values. This enables verification of the flatness and surface quality of the wafers. Additionally, VEECO / SLOAN DEKTAK 3030 can measure thin film thickness from five to 500nm, as well as thin film properties such as coating uniformity and optical thin film thickness. Overall, VEECO DEKTAK 3030 is a versatile and accurate equipment for testing and metrology of wafers and other samples. Its modular design, high-accuracy stage, and sample manipulation capabilities combine to make it a powerful tool for verifying wafer flatness and thin-film properties. This system offers laboratories a reliable and cost-effective solution for wafer testing and metrology.