Used VEECO / SLOAN DEKTAK 3030 #9096140 for sale
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Surface profiler Motorized stage Video camera Monitor Computer Does not include factory options.
VEECO / SLOAN DEKTAK 3030 is a wafer testing and metrology system designed for measuring the surface topology of semiconductor and other materials. It uses a unique stylus technique to ensure accuracy and repeatability in both vertical and lateral measurements. VEECO DEKTAK 3030 has a stage that can accommodate wafers up to 200 mm in diameter, providing a large sample area. The stylus is designed to measure bumps on the wafer's surface layer with a vertical resolution of 0.30 μm and a lateral resolution of 0.50 μm. The stylus is coupled to a piezoelectric element, which help in precise measurements across the sample. The stylus has a spring-loaded pressure-rod, which helps to eliminate environmental vibrations during measurements. A unique contact sensor technology is used by SLOAN DEKTAK 3030 to maintain consistent stylus pressure on the wafer surface. Advanced electronics behind the contact sensor also provide automatic stylus lift through algorithm-driven approaches. The system also includes a shielded enclosure to provide controlled airflow and limit external interference, and a color LCD monitor for easy operation. DEKTAK 3030 provides sensitive and exact measurements of dimensions and shapes of surface features such as step height, critical dimension, roughness, and corner/edge sharpness. It can perform measurements on virtually any wafer type, in any condition, making it ideal for a variety of metrology applications. VEECO / SLOAN DEKTAK 3030 has several unique features, such as the ability to measure three-dimensional shapes, through its combination of mechanical precision and optical technology. It provides highly accurate statistical and repeatable measurements which conform to international metrology standards such as ISO 9001. To ensure reliable data collection, it comes with a wide range of statistical algorithms which analyse and calculate profiles from data points. VEECO DEKTAK 3030 also features software innovations such as an intuitive graphical user interface for easy operation. It also has a range of automated features, including automatic stylus lifting for improved safety and data integrity. Supporting a range of computer interfaces, it can be easily integrated into existing metrology systems. Overall, SLOAN DEKTAK 3030 is an advanced, feature-rich wafer testing and metrology system designed to measure surface topology of semiconductor and other materials with superior accuracy and repeatability. Its advanced electronics, integrated shielding, and comprehensive software make it a versatile choice for a wide range of metrology applications.
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