Used VEECO / SLOAN DEKTAK 3030 #9120561 for sale
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ID: 9120561
Wafer Size: 6"
Vintage: 1986
Profilometer, 6"
Manuals included
Power supply: 115 V, 60 Hz
1986 vintage.
VEECO / SLOAN DEKTAK 3030 Wafer Testing and Metrology equipment is designed to provide the highest precision measurement results with the most efficient throughput. This system is highly automated, reliable and has a short learning curve for operating, so it is suitable to any semiconductor fabrication process. The unit is a fully computer controlled surface profile monitor and thickness gauge unit that allows for precise 3D surface analysis and precision trace analysis. It features a programmable motorised scanning head along with a programmable controller. It is equipped with a high-resolution CCD camera that allows for direct optical measurement of the surface of the wafer, offering outstanding accuracy and precision. VEECO DEKTAK 3030 is capable of performing profile measurements on wafers up to 200 mm in diameter and 2.5 mm in thickness. It utilizes a combination of laser interferometry, capacitance imaging, and direct-current light scattering to accurately measure the surface profile, topography and profile deviation from the wafer's specified nominal surface. It also can be used to obtain repeatability measurements on essential profile parameters such as curvature, step height, or others. SLOAN DEKTAK 3030 is well-suited for a variety of semiconductor fabrication processes, including oxide, implant, or diffusion processes. It is able to measure surface profile on a variety of wafers, including silicon, gallium arsenide, and other alloy materials. Furthermore, DEKTAK 3030 is capable of measuring 3D surface topography at a nanometer level of accuracy (1 nm) and provides contamination detection limits of 0.01 nm. In addition to the exceptional accuracy and precision of VEECO / SLOAN DEKTAK 3030 measuring machine, the software that accompanies the tool simplifies the data reporting process through integration with statistical analysis capabilities such as process control charts and searchable results archives. The software also provides you with the ability to access measurement data remotely, allowing you to easily share results with other users. VEECO DEKTAK 3030 is an ideal asset for both large scale production operations and small research and development laboratories. Its comprehensive functionality, exquisite accuracy, and user-friendly software make it an invaluable tool for evaluating wafer testing and metrology needs.
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