Used VEECO / SLOAN DEKTAK 3030 #9169275 for sale
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VEECO / SLOAN DEKTAK 3030 is a wafer testing and metrology equipment designed for the precision measurement of wafer features in the semiconductor industry. The system includes an integrated unit for the measurement and inspection of surface and topography features. All measurement processes are performed with the highest precision and accuracy. VEECO DEKTAK 3030 employs a unique combination of laser interferometry and stylus technology for measurement of nominally flat as well as non-flat wafers. Its versatile design allows for broad coverage over the common wafer sizes currently used in the Semiconductor industry. Custom scanning option is also available to accommodate non-typical wafer geometries. The machine's single-channel data acquisition has three measurement axes, two for lateral displacement and one for vertical displacement. This allows SLOAN DEKTAK 3030 to provide submicron resolution for wafer height measurements, critical dimension (CD) measurements, surface roughness mapping and 3-D imaging. DEKTAK 3030 has advanced software that enhances the accuracy of the measurements. The software, which features a high-contrast graphical display, helps ensure accuracy and repeatability by allowing users to view, interpret and analyze large datasets with ease. It also includes advanced algorithms for high-resolution auto focus and topography measurements, as well as feature condition analysis and data display in various graph formats. In addition, VEECO / SLOAN DEKTAK 3030 supports a wide range of measurement techniques and protocols, such as tiling, auto focus, step mode, single-point, color mapping, 3-D imaging, instant report generation, post-processing, and automated measurement sequence configuration. The tool also has an extensive selection of offline analysis and report generation options. VEECO DEKTAK 3030 is a highly reliable and robust asset that provides users with accurate, repeatable results and unmatched throughput. With its multiple features and flexible design, SLOAN DEKTAK 3030 can be used in production and research laboratories, as well as for the evaluation of advanced process technologies.
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