Used VEECO / SLOAN DEKTAK 3030 #9175618 for sale
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Wafer Size: 6"
Stylus profiler, 6" Step height measurement range: Maximum: 100 kÅ Minimum: 1310 Å Radius: 12.50 Micron Controller type: Microprocessor controller Measuring range: 100Å to 1310kÅ Scan speed range: Low, medium, high Vertical resolution: 1Å In the 65kÅ range 10Å In the 655kÅ range 20Å In the 1310kÅ range Data points per micron: 0.04 - 40 Scan length: 50 microns to 50 mm Leveling: 2 Point programmable or cursor leveling Stylus: 12.5 Micron, diamond Maximum sample thickness: 1.75" Sample stage diameter: 7" Sample stage translation: Manual: X Axis: 6" Y Axis: 3" Zoom range: 35x-200x Power requirements: 110 / 120 V 50 / 60 HZ 1 Phase
VEECO / SLOAN DEKTAK 3030 is a fourth-generation wafer testing and metrology system designed for quality control in semiconductor fabrication facilities. The unit is equipped with a 3D non-contact stylus probe that is capable of profiling the size and shape of features on the wafer surface while also measuring the height or depth of those features. VEECO DEKTAK 3030 is equipped with a stage that can accommodate up to 8" diameter wafers, as well as providing rapid substrate exchange with a dual shuttle design. SLOAN DEKTAK 3030's non-contact stylus can move across the wafer's surface with an accuracy of 0.0003 inches, while giving users the capability of automatically recognizing any design features not within a predetermined tolerance. The unit features an intuitive menu-driven software interface for easy operation and fast setup. The software also supports graphical data overlays to provide users with enhanced visibility into profile data. Additionally, DEKTAK 3030 can store up to 1,000 sample profiles and up to 99 measurement recipes for fault management specific to the wafer type. The unit is equipped with a host of additional features, such as vibration isolation to reduce sample table noise, mechanical pre-alignment using paper tape holes or fiducials to locate the wafer, and a high-efficiency air bearing to guarantee low-friction movement. Offering exemplary speed and accuracy, VEECO / SLOAN DEKTAK 3030 is a dependable, economical and precise solution for specialized wafer testing and metrology.
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