Used VEECO / SLOAN DEKTAK 3030 #9245279 for sale

VEECO / SLOAN DEKTAK 3030 is an automated, precision wafer testing and metrology equipment developed by VEECO Corporation. VEECO DEKTAK 3030 series provides accurate measurements of ultra-thin films, critical dimensions, and multi-layered structures. With an accuracy of sub- angstrom resolution and a measurement range of up to 30 mm, SLOAN DEKTAK 3030 series serves as an invaluable tool in the development of MEMS (micro-electromechanical systems) and nanotechnology. DEKTAK 3030 consists of a controller, drive system, wafer probe, and stage. The controller is a microprocessor-based unit that provides an intuitive graphical user interface (GUI) for accessing, controlling, and displaying process parameters. The drive machine consists of an array of linear and rotary motors that deliver precise motion control, stability, and repeatability. The wafer probe utilizes capacitance and laser technology to monitor and measure the surface properties of the sample in contact or non-contact mode. The stage tool provides programmable sample scanning and traversing capability using a combination of mechanical, piezoelectric, and voice coil motors. The primary applications of VEECO / SLOAN DEKTAK 3030 series are the measurement of surface roughness, stress, and thickness of wafers, as well as the critical dimension (CD) of patterned features and the position of microelectronic components. The asset is highly accurate and provides repeatability of less than 0.2 Angstroms (A) for roughness and CD measurements and 0.5 A for depth measurement. VEECO DEKTAK 3030 series offers a variety of automated metrology tools to meet the sophisticated requirements of IC, MEMS, and nanoscale device evaluation. It provides various scanning strategies for easy alignment and positioning of the test patterns. The model architecture is optimized to facilitate scalability, accuracy, and flexibility. It supports real-time data monitoring and automated operation with data logging. The upgradable embedded software enables easy programmability of the equipment functionality. The system supports features such as high-resolution imaging, speed and accuracy of measurements, non-contact mode, contactless capacitance sensing, and optional integrated AFM (Atomic Force Microscopy) and STM (Scanning Tunneling Microscopy). Overall, SLOAN DEKTAK 3030 series is an advanced metrology unit that offers high levels of accuracy and flexibility for a wide range of applications. By providing comprehensive and reliable wafer testing and metrology, the machine significantly reduces product development time and cost, ensuring a high degree of precision and repeatability.