Used VEECO / SLOAN DEKTAK 3ST #9105734 for sale
VEECO / SLOAN DEKTAK 3ST is a wafer testing and metrology equipment designed for precision analysis of semiconductor wafers. This automated system provides accurate 3-dimensional measurements of critical dimensions on semiconductor wafers during the manufacturing process. Through the use of the patented high-resolution variable capacitive transducer, VEECO DEKTAK 3ST can measure dimensions down to 1nm with a standard accuracy range of 2-10 nm. The transducer is also incredibly flexible and can be used on a variety of materials, including multiple types of metals, ceramics, and dielectric materials. The unit is designed for use in both single-sided or double-sided testing, depending on the customer's needs. It features a 10-inch probe planar gantry design with ±90° loading angle, and both manual and automatic operation. The user interface incorporates intuitive, easy-to-understand graphic displays, formatting, help screens, and equipment management functions, making SLOAN DEKTAK 3 ST easy to learn and use. The sample holder, which is moved by an X-Y stage, allows flexibility when positioning specimens, and further enhances the user experience. To improve the accuracy of measurements, VEECO DEKTAK 3 ST also features low resonance noise, superior vibration isolation, and temperature stability. This also helps to reduce distortions from varying environmental conditions. Additionally, VEECO / SLOAN DEKTAK 3 ST includes the Stylus Patrameter machine which measures the tool's track alignment and compensates for any errors. The asset further enhances accuracy with the Small Feature Analysis (SFA-10) feature, which can measure high aspect ratios, through-holes, and other features starting at 0.1μm. Finally, the model also offers SEM transfer option that enables sample transfer from SLOAN DEKTAK 3ST to a scanning electron microscope (SEM). Overall, DEKTAK 3ST is an ideal choice for 3-dimensional measurement of critical dimensions on a variety of materials with an accuracy of 2-10 nanometers. The equipment comes with a wide range of features, such as the Stylus Patrameter system, Small Feature Analysis (SFA-10), and SEM transfer option, to give users maximum control over measurements and accuracy. With easy-to-use intuitive menus, an X-Y stage for positioning, and excellent vibration isolation, DEKTAK 3 ST is an ideal testing and metrology unit for those involved in precision semiconductor work.
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