Used VEECO / SLOAN DEKTAK 3ST #9157734 for sale

ID: 9157734
Wafer Size: 8"
Vintage: 1999
Wafer surface profiler, 8" 1999 vintage.
VEECO / SLOAN DEKTAK 3ST is a powerful wafer testing and metrology equipment that utilizes state-of-the-art technologies and techniques to provide advanced metrology capability on a wide variety of materials and substrates. The system has outstanding performance across a wide range of parameters, including superior accuracy and repeatability, and is well-suited for a variety of wafer testing and metrology applications. VEECO DEKTAK 3ST consists of an XY precision positioning stage with a vertical stroke range of 3mm and a non-magnetic, stepper motor-driven piezo driven actuator, along with a single-axis stylus force sensor. The custom-designed actuator provides precision height measurement with an accuracy of 0.25 µm, and it has a response time of 0.45ms and a minimum step size of 3 nm. Additionally, the force sensor has a sensitivity of 0.1 mN and a range up to 10 mN. SLOAN DEKTAK 3 ST also includes an integrated optical microscope with a built-in 5x brightfield and darkfield imaging capability. This allows users to precisely inspect wafer characteristics and features. The microscope's optical unit provides excellent contrast and image clarity, and its integrated software provides intuitive control of all measurements, as well as robust data storage and viewing capability. SLOAN DEKTAK 3ST's non-contact metrology capabilities enable the direct measurement of resistivity, step height, and topography on a wide range of wafer materials. The machine operates in manual mode, where parameters are defined by the user, or in automated mode, where the tool is programmed to measure according to predefined test conditions. Automated mode utilizes closed loop control to keep measurements repeatable over a wide range of environmental or substrate conditions. VEECO DEKTAK 3 ST also features a variety of other sophisticated features and capabilities such as advanced data processing, dynamic pattern recognition, and multimedia data output. With these capabilities, VEECO / SLOAN DEKTAK 3 ST is ideal for a variety of applications ranging from electrical, micro-mechanical and optoelectronic device characterization, to trouble-shooting, defect detection, and failure analysis. In summary, DEKTAK 3 ST is an outstanding wafer testing and metrology asset that offers high accuracy and repeatability for a wide array of different materials and substrates. It features an advanced optical microscope, a robust force sensor, and integrated metrology capabilities, as well as sophisticated data processing and multimedia output. All of these features make DEKTAK 3ST an ideal model for a variety of applications.
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