Used VEECO / SLOAN DEKTAK 6M #293639493 for sale

VEECO / SLOAN DEKTAK 6M is an advanced wafer testing and metrology equipment designed to accurately measure features on silicon wafers and provides inspection, imaging and analysis of a wide variety of materials. The system is based on a precise air bearing platform and includes a precision fine laser interferometer positional encoder along with automated vision alignment unit and multi-axis vacuum chucks. VEECO DEKTAK 6M allows for precise x-, y-, and z-axis displacements and is capable of precise autofocus and extremely precise step-and-repeat alignment. It also provides high accuracy measurement data for the multiple of small 2D features, including surface height, flatness, step, line width and pitch measurements. The machine has the ability to reduce operator footprint, improve throughput and accuracy of wafer measurements and reduce manual calibration effort. SLOAN DEKTAK 6M provides high speed and ultra-precise non-contact metrology. It's designed for high accuracy, repeatability and fast throughput with a capability of measuring multiple features such as pad, line width, pitch and step height. The tool uses a focused laser light source and a detector assembly to measure the distances between wafer edge and feature profile. The asset can detect a single feature at various ratios, even in the smallest size of 3x2.5 microns, which is ideal for accurate wafer testing. DEKTAK 6M also boasts multiple integrated features and functions, such as automated patterns and features recognition, auto-calibration, automated plate-to-plate registration and alignment, auto height adjustment control and absolute and differential angular measurements. The model also has an advanced image matching algorithm for feature location and parametric analysis capabilities for comprehensive optical metrology and inspections. To ensure accurate and stable operation, VEECO / SLOAN DEKTAK 6M comes equipped with a high level of software control, including an advanced menu-driven software with a comprehensive database of wafer measurement instructions and automated measurements. The comprehensive database and automated instructions ensure that the equipment performs with consistent accuracy and repeatability. VEECO DEKTAK 6M also features 3-D inspection capabilities, which allow for the analysis of topography and defect sizes, shapes and roughness. In conclusion, SLOAN DEKTAK 6M is an advanced wafer testing and metrology system designed to provide precise, repeatable and high accuracy measurements. Its sophisticated menu-driven software, automated inspection and registration capabilities, and automated wafer measurement instructions make it an ideal choice for a wide range of wafer testing, imaging and metrology tasks.