Used VEECO / SLOAN DEKTAK II #9061099 for sale
Profilometer Measurement display range: 20-65,000 nm (200-655,000 angstroms).
VEECO / SLOAN DEKTAK II is a wafer testing and metrology equipment used for a variety of applications in the semiconductor industry. It uses automated scanning or high-resolution imaging techniques to measure the features of a semiconductor wafer including physical features like line widths, ridge heights, and etch depth. The system is capable of automatically measuring the surface topography of a wafer with 2-dimensional profile data acquisition. It can also measure the surface physical properties such as surface roughness, reflectance, and adhesion. The unit utilizes a combination of optical and electrical probes to measure electrical parameters of wafers such as resistance, capacitance, and current leakage. A stylus type profilometer is used to detect the position of bumps, ridges, and valleys. The stylus is capable of measuring features and heights of up to five micrometers with a resolution of 0.1 microns. It is equipped with a contact force microscope, with a capability of measuring features up to 0.1 nanometers. The machine can also measure flatness, planarity, and non-uniformity of the wafer surface. It utilizes a CCD camera along with a modified astigmatic beam profile detector to image the wafer surface, in order to measure other parameters like form deviation angle, step height, and slope accuracy. The CCD camera is calibrated and monitored with high accuracy sensors. The tool also offers the ability to test various production processes, by measuring the effects of etching, deposition, cleaning, polishing, and doping techniques. It also offers the ability to perform testing at high temperatures (up to 250C) and in a vacuum environment. The user can select from a variety of line styles, from straight lines and circles to arbitrary patterns. VEECO DEKTAK II is also capable of performing automated wafer loading and unloading. It is equipped with a wafer handling asset, which is designed to reduce potential contamination, and a robotics handling model for automated wafer loading and unloading. In addition, the equipment offers high-end performance using high speed PPG, ESD, short-time analysis and nominal testing capabilities. SLOAN DEKTAK II wafer testing and metrology system is a tool used for a variety of applications in the semiconductor industry. It is capable of measuring a variety of attributes such as surface topography, electrical parameters, surface roughness, reflectance, and adhesion. It also offers advanced tools such as contact force microscopy, CCD camera calibration, and automated wafer loading and unloading for reliable and accurate surface analysis and metrology.
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