Used VEECO / SLOAN DEKTAK IIA #9018954 for sale
VEECO / SLOAN DEKTAK IIA is a leading-edge wafer testing and metrology equipment offering sophisticated metrology capabilities to provide meaningful data for characterization of advanced semiconductor devices. The system is comprised of several components, including a wafer stage, an auto-focus unit, an optical microscope, and an autostage. VEECO DEKTAK IIA has a wafer stage capable of accommodating up to eight wafers, providing up to ten degrees of freedom for wafer alignment and positioning. The stage can move the wafers in two Cartesian parallels, four axis of inclination, two rotations, and two degrees of surface tracking. The stage can also accommodate both 300 mm and 200 mm wafers. The automatic focus machine keeps the wafers within 1 μm of optimal focus throughout the testing process. The autostage allows for precise wafer placement, achieving a repeatability that allows for consistent results. The tool is equipped with a high-speed, high-resolution optical microscope that enables precise measurements of features down to 50 nm. SLOAN DEKTAK IIA measures resistivity, topography, critical dimensions (CDs) & overlay levels, device structures, and other device parameters. It is by far the most flexible asset offered by VEECO, providing robust control and precise results in a variety of environments. Moreover, the model has several software tools that improve user productivity. The equipment enables fast and accurate data collection and analysis of advanced process steps. It permits quantitative assessments to be made that enable the monitoring of wafer yield, the identification of repeatable device areas, and the provision of valuable process development feedback. In addition, DEKTAK IIA is compatible with ebeam and X-ray inspection tools, allowing manufacturers to precisely measure various structures on the wafer. In summary, VEECO / SLOAN DEKTAK IIA is a versatile wafer testing and metrology system that offers sophisticated capabilities to provide crucial data for characterization of advanced semiconductor devices. The unit is equipped with a high-speed, high-resolution optical microscope, enabling measurements of features with a resolution of 50 nm. It furnishes fast and precise data collection and analysis of a wide variety of device parameters. Additionally, its unique software tools improve user productivity and permits quantitative assessments that can be used to monitor wafer yields and therefore increase profits.
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