Used VEECO / SLOAN DEKTAK IID #9160091 for sale
Profilometer Three scan speeds Tracking force: 10 to 50 mg Measurement range: 50A to 655KA Vertical resolution (max): 5A Scan length range: 50um to 30mm Sample thickness (max): 20mm Horizontal data points (max): 1000 Horizontal resolution: 0.05um Stylus force: From 10 to 50mg manual adjustment Video camera optics for sample viewing: 90x Sample stage diameter: 127mm Sample stage x axis: +/- 10mm Sample stage y axis: +/- 10mm to -70mm Sample stage theta rotation: 360 Sample stage positioning: Manual Analytical functions: 4 115 V, 50/60 Hz.
VEECO / SLOAN DEKTAK IID is an advanced wafer testing and metrology equipment designed to provide fast, accurate analysis of semiconductor wafer materials. The system is composed of four main components—a scanning electron microscope (SEM), an integrated profilometer, a particle/metal detector, and an optical microscope. The integrated profilometer measures the geometry of a wafer up to three-dimensional accuracy along with vertical displacement and tilt. The scanner moves the wafer along the X and Y axes while collecting topography information. It can measure features as small as 0.1 μm, with a resolution of 0.25 μm. The particle/metal detector is a high-sensitivity detector that identifies and locates trace metallic elements and particles on the surface of the wafer, enabling early defect detection. The optical microscope is a modified digital microscope capable of magnifying up to 1600x and of superimposing with SEM images to accurately identify defects. VEECO DEKTAK IID also provides an easy-to-use graphical user interface (GUI). The GUI allows users to set up the unit quickly and intuitively, making it easy to operate for users of all levels. The machine includes a comprehensive set of analysis tools, enabling users to perform surface roughness, photocopy analysis, step height measurement, and other tests. For maximum uptime and throughput, SLOAN DEKTAK IID is engineered to support automatic wafer loading and unloading with multiple sampleholder configurations. The sample holders are designed for easy insertion, removal, and exchange. The tool also includes an automatic process correction asset that dynamically adjusts its parameters for increased accuracy in process optimization. In conclusion, DEKTAK IID is an advanced wafer testing and metrology model designed to provide quick and accurate analysis of semiconductor wafer materials. It features a highly sensitive particle and metal detector to detect defects early, an easy-to-use GUI, comprehensive analysis tools, an automatic process correction equipment, and automatic wafer loading and unloading support. With its robust features and easy operation, VEECO / SLOAN DEKTAK IID is an ideal choice for semiconductor wafer testing and metrology.
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