Used VEECO / SLOAN DEKTAK SXM #9361063 for sale
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VEECO / SLOAN DEKTAK SXM is a wafer testing and metrology equipment used in the semiconductor production process. This system is ideal for non-contact surface measurements of semiconductor wafers up to 300 mm in size and 10 mm thick. The unit is designed to measure critical features such as resistivity, layer thickness and other material properties, as well as surface topography features such as depth and radius. VEECO DEKTAK SXM is a scanning probe microscope (SPM) that can measure either static or dynamic topographies on the surface of the wafer. The static scans are used for visualizing the surface of the wafer and making contactless measurements. The dynamic scans provide a three-dimensional (3D) topographical image of the surface. This allows for an analysis of the stepped layers of the wafer's surface. The SXM machine measures multiple parameters such as surface texture, step height, line geometry, surface roughness and film thickness. It is capable of measuring features up to 300 nanometers in size. The tool can also measure surface flatness and other 2D and 3D features. The asset is equipped with a variable speed drive motor that allows the probe to scan the surface with precise control. The force is adjusted between the probe and the wafer surface to optimize the resolution of the measurement. To maximize the accuracy of the measurements, the model includes an automated electrostatic calibration equipment that automatically adjusts the probe height. The SXM system is designed for fast, reliable, and accurate measurements of non-contact surface features. The unit is capable of measuring several samples simultaneously and can be used to measure both flat and curved surfaces. It is also equipped with a variety of software packages for data processing, image enhancement, and analysis. The machine has been designed to be user-friendly and is suitable for a wide range of production applications.
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