Used VEECO / SLOAN DEKTAK V-200 Si #139116 for sale
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ID: 139116
Wafer Size: 8"
Vintage: 2001
Stylus Profiler, 8"
Range: 0.3-30mg stylus force
XY Travel: 8" x 8"
Rotation: 360º
Remote controlled video camera
Zoom range: 60x-420x
Vertical range: 25A - 2620A
Vertical resolution: 1A at 65KA, 10A at 655KA, 40A at 2620KA
Scan length: 50 microns to 200 mm
Automatic stage leveling
Maximum sample thickness: 45mm
Printer: Ominprint 426
Power: 120V, 5.5 amps, 50/60Hz
2001 vintage.
VEECO / SLOAN DEKTAK V-200 Si is a multi-functional wafer testing and metrology equipment widely used in the semiconductor industry. The system bridges the gap between manual measurements and highly automated testing and measurement systems. The unique combination of rapid scanning, high accuracy and low cost of ownership of the V-200 permits fast and accurate measurements of critical parameters of wafers with minimum time and effort. The V-200 enables users to obtain comprehensive measurement and analysis information quickly and easily. A user-friendly wheel menu provides easy access to all unit functions. The machine is capable of measuring topography of the wafer, including adhesion, voids, surface flatness and defects. Additionally, the tool can measure physical properties such as thickness, surface structure, electrical properties and optical characteristics. Furthermore, the V-200 is able to analyze stress in silicon structures, as well as analyze oxide, nitride and silicate materials. The asset is designed without compromising accuracy or precision. The accuracy of the V-200 is maintained by its built in features such as its temperature controlled stage, collimator optics, auto-focus model and motorized z-axis stage. Additionally, the equipment features the classic non-contact scanning capability of the classic Dektak Measurement System and the ability to read any type of sample including semi-empirical and custimized recipes. The V-200 also offers more advanced features such as autofocus and autocollimation for autofocusing of complex masks and samples. The unit includes advanced filter processing technologies, producing seamless measurements with reduced noise. Picture imaging capabilities allow users to quickly and accurately inspect areas of interest. A high-speed controller facilitates the rapid data acquisition of wafers at up to 2000 points per second and a wide range of measurement areas, from 1mm to 120mm. In conclusion, VEECO V200-SI is a multi-functional wafer testing and metrology machine offering advanced features and a wide range of applications in the semiconductor industry. The accuracy and speed of the tool ensures consistently accurate results, making it an ideal choice when testing, metrology and data analysis are necessary.
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