Used VEECO / SLOAN DEKTAK V-200 Si #9412436 for sale
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VEECO / SLOAN DEKTAK V-200 Si is a wafer testing and metrology equipment specifically designed for silicon-based materials. It provides non-contact, 3-D surface measurements of semiconductor devices and printed circuit boards. The system offers high accuracy, resolution and repeatability of measurements along with full automation and flexibility in data collection to meet the stringent requirements of semiconductor manufacturers. The V-200 Si is a high-precision 3-axis microscope that can measure wafers up to 200 mm in diameter. It is equipped with a 50-200 micron high-accuracy vertical measurement axis, providing industry-leading accuracy and repeatability of measurements. The unit is designed to measure flat and curved surfaces. It can measure topography and thickness as well as active device-level features such as trenches, contact vias, and gate oxides. The V-200 Si is powered by a high-speed, 5-axis motion control machine with a capability of 0.2nm resolution for the X, Y, and Z axes, and 320 nm/s maximum traverse speed. The tool also features skew, bow, and twist correction for improved accuracy of surface measurements. A multi-region data acquisition asset ensures high-speed and accurate data collection. Furthermore, a frame rate of up to 9 fps can be set for specific measurements, allowing for faster results with less data overhead. The model is equipped with proprietary software and hardware vital to the performance of the device. The software includes a GUI and a data analysis program that allow a user to control and analyze the collected data. It can also be integrated into a user's existing quality and manufacturing control systems. Additionally, the equipment is designed with special automation and safety features that enable fast and efficient testing while maintaining safety of the operator. VEECO V200-SI is capable of providing consistent and accurate results, making it ideal for measuring semiconductor and printed circuit board wafers. With its fully automated features, flexible data collection, high accuracy, and integrated software, the system is an invaluable asset for the semiconductor industry.
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