Used CANON / ANELVA L-210H-WS for sale

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CANON / ANELVA L-210H-WS #9055191
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CANON / ANELVA

L-210H-WS

Dry etcher Load lock type Method: RIE Pumping system:(2) R/P, (1) TMP Gases: O2, CF4, Ar, CHF3, C4F8
40
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