Used OXFORD Plasmalab 100+ ICP 380 for sale

Name: OXFORD Plasmalab 100+ ICP 380
SKU: Plasmalab 100+ ICP 380
Availability: PreOrder

Etchers / Ashers

Manufacturer

OXFORD

Model

Plasmalab 100+ ICP 380

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Reactive Ion Etcher (RIE) Process module Process chamber inside-kit Outside & Inside loadlock Gas su

272

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Reactive Ion Etcher (RIE), 6"-8" X20 PLC Upgraded Process: Ar, O2 Hine robot 25-Slots cassette modul

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Reactive Ion Etcher (RIE), 8" Process: Ar and O2 Hine robot 9-Slots cassette module Gases: O2, CHF3,

207