Used CYBEROPTICS EX-43Q #9079803 for sale
Wafer mapping sensor Dual wide beam Optimum detecting distance: 1.5" Maximum detecting range: 1.4" - 1.6" Voltage: 9 24 V DC Current consumption: 130 mA, 200 mA max Light source: (2) 850 nm Diode lasers (2) 0.6 mW max, 0.77 mW max Laser class: Class 1 (CDRH) Detectable objects: Transparent, opaque and mirrored surfaced objects Laser spot size: 10 mm x 0.05 mm Working angle: ±16° Response time: 400 us max Minimum pulse width: 5 msec Indicator: Laser power (Red) Signal out (Green) Control output: MOSFET Open drain, low true, 80 mA max at 24 V DC Connections: 16", (4) Conductor cables Temperature limits: Operating: 0° to 40°C Storage: -30° to 55°C.
CYBEROPTICS EX-43Q is a non-contact optical wafer testing and metrology equipment that offers highly accurate dimensional and topographical profiling for wafers up to three-inches in diameter. This system combines advanced profiling algorithms with a high power laser diode to provide fast, high resolution measurements. EX-43Q is reliable and robust, making it ideal for both automated probing and manual testing. The unit uses a Fiber Bragg Grating (FBG) optical head with a 15mm standoff from the wafer and a 90mm focal length for added depth of focus. This optical head is connected to a motorized XY stage with a 470mm x 470mm workspace, a 200mm lift range, and an alignment accuracy of 0.1µm. Combined, these features provide for robust and consistent wafer measurements and a high degree of repeatability. The machine is designed to run quickly, exhibiting a scan speed of 5.25m/sec and maximum acceleration of 1.3 m/s2, while providing accuracy of 3µm of full-width at half-maximum (FWHM) over a range of wafer flatness from 0.05 - 3.0mm. Additionally, CYBEROPTICS EX-43Q offers data viewing and recording, with image data stored in graphical formats such as JPG and TIFF files. The tool requires minimum maintenance or intervention, making it well suited for extended production environments. EX-43Q is highly configurable and can be used in multiple settings, with additional options such as a closed loop servo motorized inspection head and automatic wafer capture accessory available. Overall, CYBEROPTICS EX-43Q wafer testing and metrology asset provides reliable, accurate results in an efficient and cost-effective manner. Its air-assisted non-contact design reduces wear and tear on samples, while its expandability and configurability make it an ideal choice for a variety of automated and manual testing scenarios.
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