Used TEL / TOKYO ELECTRON TSP-305555SSSS for sale

Name: TEL / TOKYO ELECTRON TSP-305555SSSS
SKU: TSP-305555SSSS
Availability: PreOrder

Etchers / Ashers

Manufacturer

TEL / TOKYO ELECTRON

Model

TSP-305555SSSS

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Etcher Process: Oxide (5) Loadports iH160 Pumps: Chamber position / Gases Unit 1 / N2, Ar, O2, C4F8

135

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Etcher Process: Oxide (5) Loadports iH160 Pumps: Chamber position / Gases Unit 1 / C4F6, C4F8, N2,

Etcher Process: Oxide (5) Loadports iH160 Pumps: Chamber position / Gases Unit 1 / N2, C4F8, Ar, O2

116