Used ULVAC CME-400ET for sale

Manufacturer
ULVAC
Model
CME-400ET
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ULVAC CME-400ET #9279188

ULVAC

CME-400ET

PECVD system Load lock type Vacuum pump: PMB + DRP Substrate size: 310 × 410 Al Tray (dia.100 × 10,
55
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ULVAC CME-400ET #9266625

ULVAC

CME-400ET

PECVD System, 8" (2) Trays, 8" (310 x 410) Gas: SiH4 / N2, NH3, N2, N2O, O2, CF4 2010 vintage.
62