Used ULVAC MLX-3000N #9279417 for sale

ID#: 9279417

Manufacturer:

ULVAC

Model:

MLX-3000N

Vintage:

2010

Equipment Details:

Sputtering system
Multi chamber type (C to C)
Substrate size, 6" diameter

L/UL Chamber
(3) Sputter Chamber
Etching chamber
Pre-heat chamber (Max 700℃)

Vacuum pump (1):
Turbo molecular pump
Dry pump

Vacuum pump (2):
Cryo pump
Cryo trap
Dry pump

Sputter source: Cathode 4" diameter
Sputter DC / Etching RF power source
Process gas: Ar

2010 vintage.
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