Used KLA / TENCOR / PROMETRIX 6200 Surfscan #192508 for sale
KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment designed specifically for quality control and defect detection in the semiconductor industry. It uses multiple technologies to measure the topography of the wafer surface, including optical interferometry, laser scatterometry, and electron backscatter diffraction. KLA 6200 Surfscan has a sample stage that accurately measures, positions, and scans the wafer as required for data collection and analysis. This can be done using an automated wafer handler if necessary. TENCOR 6200 Surfscan's optical interferometry technology uses an interference pattern generated by coherent light to generate a 3D topographic map of the wafer's surface. The system then uses this data to measure a number of surface parameters such as flatness, step-height, hillocator, and roughness. The laser scatterometry technology operates based on the interaction between light and a surface. Measurements are taken based on the relationship between the intensity of the scattered light and the rough surface characteristics of the wafer. The Electron Backscatter Diffraction (EBSD) is used to determine the microstructure of the sample by diffracting electrons off the material's lattice. PROMETRIX 6200 Surfscan is capable of handling a wide variety of wafer materials and sizes, including 300 mm & 200 mm wafers. The unit also has a number of optional features including an adjustable beam scanner, for optimization of optical interferometry resolution, and software packages for the analysis and generation of wafer reports. The machine also has a number of safety features, such as collision detection, an adjustable safety fence to protect the sample, and a laser shutter for monitoring light levels. 6200 Surfscan is a powerful tool for quality control and defect detection for leading edge semiconductor applications. It offers fast, accurate, and reliable results, helping manufacturers ensure the highest quality products.
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