Used KLA / TENCOR AIT #293679488 for sale
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ID: 293679488
Wafer Size: 8"
Defect inspection system, 8"
BROOKS AUTOMATION ATM-107-2-S-CE Robot
BROOKS AUTOMATION ESC-212 Robot controller
BROOKS AUTOMATION PRE-201-CE Pre-Aligner
Missing parts:
Keyboard
Monitor
JDS Uniphase 2114B-30SLQRT Laser power supply
CPM Power Supply (Powerone HPF5A2B1A1P6-S549/VAD557 / UniPower HPB-2A2GA3D3D5A)
1999 vintage.
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