Used RUDOLPH / AUGUST NSX-105 (Mask & Wafer Inspection) for sale
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RUDOLPH / AUGUST
NSX 105
Wafer inspection system, 8"
Standalone
Main body
EFEM
Main UI
Protection bar
Manual type
Inspection edge contact chuck
Platform for 8"
Matrox 4M
GENESIS Board
Inker
KEYENCE LK-G15 Focus sensor
Objectives: 1x, 2x, 3x, 5x and 20x
Camera type: ADIMEC 1600M (7.4 um/pixel)
Ring light (Dark file illumination)
Without robot handling module
2005 vintage.
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RUDOLPH / AUGUST
NSX 105
2D Automatic Optical Inspection (AOI) system, parts machine
Missing parts:
Odyssey board
Robot assy
Stage ball screw
Pre-aligner
Camera
Turret
CCD
PC
Power supply.
RUDOLPH / AUGUST
NSX 105
Defect inspection system, 12"
With UltraPort handler
Optics: 1x, 2x, 5x, 10x, 20x
Inspection camera: CCD Monochrome (1.8 MB)
Review camera: 3-CCD Color
Illumination: Speed strobe
Staging continuous scan technology
Linear motor drives inspection axis
Automatic data collection and reporting
Speed laser focus
Wafer handler, 6"
OCR
Inker
GENESIS Grabber boards
Operating system: Windows
Power supply: 200-240 V, Single phase, 6 A
2005 vintage.
RUDOLPH / AUGUST
NSX 105
Macro defect inspection system
Includes:
Wafer handler
Universal film frame handler
Missing / Damaged parts:
X-Stage encoder
NSK Controller
Matrox PC
PS Stage, 24 V
2006 vintage.
RUDOLPH / AUGUST
NSX 105
Automated defect inspection system, 8"
(2) Load ports, 6"-8"
BROOKS (Robot and aligner)
Wafer stage, 12"
(5) Optic lens
With CCD 3D camera (SONY)
2003 vintage.
RUDOLPH / AUGUST
NSX 105
Inspection system, 8"
(2) Load ports, 6"-8"
BROOKS AUTOMATION Robot and aligner
Wafer stage, 12"
(5) Optic lens with SONY CCD 3D camera
2004 vintage.
RUDOLPH / AUGUST
NSX 105
Automatic Vision Inspection (AVI) system, 8"
Loading configuration: Open cassette & FOUP
Inspection camera: 1.8MB Monochrome CCD
Review camera: 3CCD Color
Illumination: High speed strobe
Operating system: Windows XP
Automatic data collection & reporting
High speed laser focus
Optics: 1x, 2x, 5x, 10x, 20x
Whole wafers: 1"-12"
Min defect: 0.5 um
Pneumatic inker.
