Used KLA / TENCOR 5100 #293603393 for sale
URL successfully copied!
Tap to zoom
ID: 293603393
Overlay inspection system
(2) PZT Sensors 450-451849-00
ALMB PCB 710-404368-00
Main frame
Console
Power stabilizer
Exhaust fan
LAMBDA 284BE-1A-1715 Power supply missing.
KLA / TENCOR 5100 is a wafer testing and metrology equipment which provides advanced process and device characterization for semiconductor manufacturing. It is specifically designed for wafer characterization of next generation devices in the sub-2x nanometer regime. The system utilizes advanced imaging technology to quantify low dose scatterometry across a range of semi-conductor processes. This includes light diffraction and transmission imaging for high contrast inspection and a unique autofocus optical unit for locating critical defects and hotspot measurements. KLA 5100 offers rapid scan rates and automated calibration, both key features for ensuring accurate and repeatable results. Its built-in autofocus ensures that images remain in focus even when wafers are placed at various depths, while the automatic alignment routines keep the imaging machine properly aligned during operation. The tool also has superior alignment accuracy and repeatability across a wide range of materials, allowing users to easily manipulate the optics and quickly adjust to different materials. Additionally, it offers a range of sampling techniques for diverse applications, including overlay and direct measurement for advanced device characterization. The asset boasts high throughput with a fast scan speed, low noise imaging technology, and integrated database and analytic tools to ensure data is correctly stored and easily accessed. Additionally, it has intelligent interface components and intuitive tools such as an intuitive analysis software and a robust defect database, as well as real-time metrology analysis. The model's advanced robotics feature also ensures accuracy by allowing users to quickly move the equipment to any position, mitigating the hassles of manual stage movements or feature allocation. TENCOR 5100 is an invaluable tool for semiconductor manufacturers looking to maximize their process and production capacity. The system is capable of quickly and accurately characterizing wafers, ensuring that high-yield wafers hit the market with maximum efficiency. Furthermore, the unit's advanced features, such as data storage and analysis tools, ensure that the data collected is seamlessly stored and accurately organized. Thus, 5100 machine is a powerful tool for semiconductor manufacturing, providing essential insights into device characterization for enhanced quality control and process optimization.
There are no reviews yet