Used TEGAL 901 / 903 #9285865 for sale

TEGAL 901 / 903 Asher/Etcher is one of the most powerful and versatile etching/ashing systems available. It provides ultra-high throughput with both dry-etch and wet-etch processes. The equipment is capable of etching/ashing 3" and 4" wafers at high speed due to its high-powered process chamber, high-power radio frequency generator, and a robotic wafer handling system. The process chamber of the unit is made of stainless steel with a heat resistant ceramic lining. Inside the chamber is the etching/ashing electrode assembly which is powered by a high-power radio frequency generator. This allows the etching/ashing parameters to be tailored to the customer's specific application. The gas feed machine ensures fast and efficient removal of gas byproducts from the process chamber. The wafer handling tool is capable of handling up to five wafers simultaneously at a feed rate of up to 200mm per second. It also allows for an increased uniformity over a wide range of wafer sizes, with an accuracy of 0. ²mm. The robotic mechanism offers the lowest total cost of ownership for the wafer handling asset and provides a maximum availability for production quality. The wafers are placed on a wafer holder which is moved pneumatically from the load station to the unload station. The selectable etch rates and high throughput are provided by a reliable two-stage power dissipation model that offers uniform gas distribution via pressure pumps. The monochromatic plasma generator provides precise control of ion energy and temperature which are important parameters for the etch and ashing processes. This results in maximum control over the etch and ashing profiles, providing the highest throughput and highest quality wafers. 901 / 903 Asher/Etcher is designed with safety, maintenance, and reliability in mind. It incorporates a series of firewalls and spark suppression systems to ensure safety during operation and maintenance. It also boasts a highly efficient cooling equipment as well as a comprehensive list of spare parts and components to guarantee long term reliability and performance. In summary, TEGAL 901 / 903 Asher/Etcher is an efficient and reliable etching/ashing system that provides maximum control and ultra-high production yields. It is the ideal choice for working with a variety of wafer sizes and is exceptionally reliable and safe.