Used HMI eScan 315 #9204651 for sale
URL successfully copied!
Tap to zoom
ID: 9204651
E-Beam inspection system
(2) TDK TAS300 E4 Load ports
BROOKS AUTOMATION ABM407B-1-S-CE-S293 Robot
BROOKS AUTOMATION PRE-300BU-I-CE-S2 Pre-aligner
BROOKS AUTOMATION SC81-CE Controller
HMI System controller.
HMI eScan 315 is an automated wafer and mask inspection equipment manufactured by HMI, designed for cost-effective solutions for patterned wafer and photomask inspection processes. Powered by a proprietary PAT-FINDER image processor, the system utilizes a three-channel color CCD camera to accurately capture images from up to 143 wafers or masks per scan. This enables quick and accurate defect inspection, ensuring that production techniques are consistently reliable and profitable. EScan 315 comes equipped with a high-speed color CCD camera and an X, Y and Z motion stage to ensure reliable imaging of product over large areas. The wafers are first scanned using color CCD technology and then the images are processed for detailed pattern inspection and comparison. The PAT-FINDER image processor uses both bright and dark field illumination to maximize sensitivity, and an automated edge detection algorithm provides a uniform baseline for pattern comparison and quantification. Using HMI eScan 315, users have the ability to adjust defects thresholds, select defect types to be detected, and review image scans to accurately determine the cause of defects. The unit also features a user-defined scouting feature, which provides an added level of control over the inspection process. The scouting feature allows users to easily and quickly inspect for a variety of product defects. EScan 315 is designed with industry-standard safety features and a modular engineering design providing users with maximum flexibility and ease of maintenance. Modular maintenance allows quick, easy access to the main components, which reduces downtime and saves costs. HMI eScan 315 also features advanced motion control capabilities, including multiple-axis scanning and interpolative motion control. EScan 315 is a cost-effective instrument for wafer and mask inspection processes, providing accurate defect detection and defect remediation. With robust technology, advanced motion control capabilities, and a modular engineering design, HMI eScan 315 is an ideal choice for any industry or research organization. The machine provides reliable and repeatable scanning with minor maintenance and minimal downtime, ultimately leading to higher production efficiency and lower production costs.
There are no reviews yet