Used TEL / TOKYO ELECTRON UW200Z #9250869 for sale

ID#: 9250869

Model:

UW200Z

Vintage:

2005

Wafer Size:

8"

Equipment Details:

Batch wafer processor, 8"
Dry in / Dry out
Install type: Thru-The-Wall (TTW)
Automated load / Unload

Bath config:
Citric
POU (Point of use, configurable, HF)
SD2 (HF / IPA Dry)

Typical process flow:
Citric -> POU (HF/QDR) -> SD2

Includes:
Fire suppression system
UPS (For computer only, installed on tool)
UPS (Full system, stand-alone unit)

2005 vintage.
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