Used BROOKS AUTOMATION 003-7200-23 #9226630 for sale
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ID: 9226630
Backbone platform
BROOKS 003-1600-32 Mag 7 Robot
BROOKS 002-4037-03 Power pack
(2) BROOKS 003-9010-03 VCE 6 Vacuum cassette elevators
(2) VAT 0310X-CA24-AKK3 Rectangular gate valves
BROOKS Pre-aligner
BROOKS Mag 7 arm set
BROOKS 002-7090-04 Aquatran wafer handling robot
BROOKS 101374 Robot controller
(2) BROOKS 002-7200-21 Load ports.
BROOKS AUTOMATION 003-7200-23 is a wafer handler engineered for precise and reliable wafer handling and positioning within the semiconductor industry. It is the latest model in BROOKS AUTOMATION suite of wafer handlers and offers superior accuracy levels for wafer grab and placement. The equipment is driven by an integrated dual-axis servomotor, which ensures superior, precise and reliable motion capabilities within the wafer handler. This servomotor can support up to 5 axes of motion: X, Y, Z axis for wafer placement and two axles for wafer size selection, as well as tilt and rotation for alignment. The integrated PID motion controller provides smooth, real-time motion trajectories, while a built-in position encoder provides position feedback to ensure accurate and reliable wafer positioning. A vision system is also integrated to ensure accurate and precise alignment of the wafer for placement. The unit is designed to be highly efficient and cost-effective as well. It is capable of processing wafers efficiently, maximizing throughput while minimizing downtime for unloading and loading the new wafers. It further incorporates a selective transport mechanism which allows for quick and easy loading/unloading of wafers. An intuitive and user-friendly touchscreen display makes machine setup and operation a breeze, while a modular design allows for an upgradeable, flexible configuration. The machine is also designed for robustness and longevity, providing accurate and reliable wafer handling for the long term. The tool is designed for extreme operating conditions and is equipped with an integrated environmental control asset. Furthermore, the model is designed to facilitate periodic maintenance and calibration of the equipment components to ensure top-notch performance. 003-7200-23 wafer handler is a highly advanced, reliable and efficient integrated wafer handling system ideal for semiconductor fabrication application requiring superior accuracy and reliability.
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