Scanning Electron Microscopes

ZEISS Merlin Scanning electron microscope Secondary electrons: 1.0 nm at 15 kV 1.8 nm at 1 kV 3.0 nm at 200 V Acceleration voltage range: 20 V to 30000 V Magnification: 12x to 2000000x without using overview modes Overview mode: 1x to 20x Operating currents: 10 pA to 20 nA Optimum analytical working distance: 8.5 mm Energy dispersive spectrometer within 8.5 - 20 mm Vacuum system: Oil-free Low vacuum mode with variable pressure range of 10-133 Pa Auto-alignment system with built-in anti-vibration platform Working table with motorization on 5 axes X Axis :130 mm Y Axis: 130 mm Z Axis: 50 mm Continuous rotation: Up to 360 gr Slope range: - 3 gr - + 70 gr Accuracy movement not worse than 1 μm Table type: Combined eucentric Table control: Double joystick Remote panel 1: Trackballs & Function buttons integrated with computer keyboard Remote panel 2: Maximum dimensions: Diameter: up to 200 mm Thickness: up to 80 mm Computer control unit: Intel core 2 duo Operating system: Windows Part number Description 349520-9031-000 20nA High resolution configuration for VP systems GEMINI I 347823-9056-000 Operating system Windows with keyboard 346023-9011-140 Control panel with rotary controls and keyboard 349506-9003-000 Pneumatic retractable multi-mode STEM-detector, with 12x sample holder for BF & DF detection 347805-8027-000 Stem MP-port 2 adapter 66 mm for SUPRA 55/55VP & ULTRA 55 / ULTRA Plus & Merlin 348242-8146-000 Multiple single stub holder 4 x 3 348242-8142-000 Multi-purpose sample holder 348242-8075-000 Large multi-purpose sample holder 348342-8055-000 Faraday cup. Stub with integrated hole-aperture to measure the probe current 348242-0026-000 Dovetail basic unit for customer's own sample holders 348224-6062-000 Dual channel operation 348224-6003-000 Dual magnification 348224-6013-000 Image maths 348224-6030-000 Compucentric stage 348224-6029-000 Stage registration 348224-6007-000 Stage scan pattern 348224-6014-000 RS 232 Remote control 348224-6058-000 Drift correction 498-237 USB Dongle for drift correction 348224-6080-000 Fish-eye mode 347823-9117-100 X-ray & external scan input panel kit C/w REMCON 346033-9220-000 ACD4 Board 346023-8012-000 Additional 24" flat panel TFT colour display monitor 346000-8026-010 Quiet mode 345596-0000-000 Compressor 345980-9023-000 Chiller aircooled 354752-9836-000 Specimen preparation kit. ZEISS Merlin FEG Scanning electron microscope (SEM), 2013 vintage.

AMAT / APPLIED MATERIALS VeritySEM Scanning electron microscope (SEM), 8" Process: Metrology (2) Dry pumps: EBARA ESR20N Includes cables Missing part: AC Power rack 2005 vintage.

AMAT / APPLIED MATERIALS Verity SEM 2 CD Scanning electron microscope, 12" 2006 vintage.

APPLIED MATERIALS G6 450 Defect review scanning electron microscope 2013 vintage.

APPLIED MATERIALS Verity Scanning electron microscope (SEM) CDSEM (BEOL) With FIB.

AMAT / APPLIED MATERIALS VeritySEM Scanning electron microscope (SEM).

APPLIED MATERIALS VeraSem CD-Scanning electron microscope (SEM), 12" 2002 vintage.

AMAT / APPLIED MATERIALS VeritySEM Scanning electron microscopes (SEM), parts machine Main body Controller rack UPS & Filter assy Not includes: PCB Power supply Computer Parts missing 2006 vintage.

AMAT / APPLIED MATERIALS VeritySEM Scanning Electron Microscopes (SEM).

AMAT / APPLIED MATERIALS NanoSEM Critical Dimension Scanning Electron Microscope (CD-SEM) 2004 vintage.

AMAT / APPLIED MATERIALS VeritySEM Scanning Electron Microscope (SEM), parts system Missing parts: Stage cables All hard disks MEC CPU VME Board 2004 vintage.

APPLIED MATERIALS VeraSEM System, 12".

AMAT / APPLIED MATERIALS VeritySEM 2 CD Measurement systems.

AMAT / APPLIED MATERIALS VeraSEM Critical Dimension Scanning Electron Microscope (CD-SEM) 2001 vintage.

AMAT / APPLIED MATERIALS NanoSEM Critical Dimension Scanning Electron Microscope (CD-SEM) 2002 vintage. AMAT / APPLIED MATERIALS VeraSEM Critical Dimension Scanning Electron Microscope (CD-SEM) 2003 vintage.

APPLIED MATERIALS VeritySEM Scanning electron microscope (SEM) 2007 vintage.

APPLIED MATERIALS VeritySEM 2 CD Scanning electron microscope (SEM), 12" VeritySEM1 Upgrade to VeritySEM2 Thermally assisted field emission electron gun Patented electron optics (Including YAP detector) SEM Autofocus and autostigmation module Open cassette ports: 3 x 300 mm Standing / Sitting operator console 3D Sidewall imaging Signal tower Thermal video / Alphanumeric printers Database server Metrology: Repeatability: L-0.45nm CH-0.55nm (1) - 1deg/1deg/1deg - 10nm/10nm/17nm Reproducibility: L-0.45nm CH-0.55nm (1) - 1deg/1deg/1deg - 10nm/10nm/17nm (3) Matchings VeritySEM2: 0.9nm Imaging: Image resolution: 1.65nm @ 800,0 V (4) Side wall imaging: 15° Tilt at 4 directions (5) HAR Imaging: 1:30 Features System performance: (5) Sites / Wafer: 65 WPH / 13 WPH (20) Sites / Wafer: 33 WPH PR Success rate: 99.70% MTBF: 1000 Hours MTTR: 4 Hours MTBA: 24 Hours Availability: 95% Footprint / Configuration / Without service area / With service area 4 x 200 & 4 x 150 / OC / 4.24 sqm / 7.14 sqm 3 x 200 / SMIF / 4.61 sqm / 7.40 sqm 2 x 300 / FOUP / 5.15 sqm / 7.48 sqm 3 x 300 / FOUP / 6.21 sqm / 8.34 sqm Wafer particle contamination: Front 0.09um particles: 25 PWP / Wafer (With mini environment) Front 0.2um particles: 5 PWP / Wafer (With mini environment) Back 0.2um particles: 3000 PWP / Wafer (With mini environment) Carbonization: 0.05nm Per visit Equipment parameters: Optical magnification: 16x, 220x FOV: 450 mm to 6000 mm SEM Magnifications: 1000x to 400000x (100 mm - 0.25 mm) Stage: 300 mm/s With continuous motion trackball Power: ABW - 10.5nm (7) Accelerating voltage: 0.2 kV - 2.5 kV Extraction: Up to 4kV Probe current: 5pA - 500pA 2003 vintage.

AMAT / APPLIED MATERIALS VeraSEM Critical Dimension Scanning Electron Microscope (CD-SEM) 2003 vintage.

AMAT / APPLIED MATERIALS VeraSEM Critical Dimension Scanning Electron Microscope (CD-SEM) 2003 vintage.

AMAT / APPLIED MATERIALS VeritySEM 2 Critical Dimension Scanning Electron Microscope (CD SEM).