Scanning Electron Microscopes

ZEISS Merlin Scanning electron microscope Secondary electrons: 1.0 nm at 15 kV 1.8 nm at 1 kV 3.0 nm at 200 V Acceleration voltage range: 20 V to 30000 V Magnification: 12x to 2000000x without using overview modes Overview mode: 1x to 20x Operating currents: 10 pA to 20 nA Optimum analytical working distance: 8.5 mm Energy dispersive spectrometer within 8.5 - 20 mm Vacuum system: Oil-free Low vacuum mode with variable pressure range of 10-133 Pa Auto-alignment system with built-in anti-vibration platform Working table with motorization on 5 axes X Axis :130 mm Y Axis: 130 mm Z Axis: 50 mm Continuous rotation: Up to 360 gr Slope range: - 3 gr - + 70 gr Accuracy movement not worse than 1 μm Table type: Combined eucentric Table control: Double joystick Remote panel 1: Trackballs & Function buttons integrated with computer keyboard Remote panel 2: Maximum dimensions: Diameter: up to 200 mm Thickness: up to 80 mm Computer control unit: Intel core 2 duo Operating system: Windows Part number Description 349520-9031-000 20nA High resolution configuration for VP systems GEMINI I 347823-9056-000 Operating system Windows with keyboard 346023-9011-140 Control panel with rotary controls and keyboard 349506-9003-000 Pneumatic retractable multi-mode STEM-detector, with 12x sample holder for BF & DF detection 347805-8027-000 Stem MP-port 2 adapter 66 mm for SUPRA 55/55VP & ULTRA 55 / ULTRA Plus & Merlin 348242-8146-000 Multiple single stub holder 4 x 3 348242-8142-000 Multi-purpose sample holder 348242-8075-000 Large multi-purpose sample holder 348342-8055-000 Faraday cup. Stub with integrated hole-aperture to measure the probe current 348242-0026-000 Dovetail basic unit for customer's own sample holders 348224-6062-000 Dual channel operation 348224-6003-000 Dual magnification 348224-6013-000 Image maths 348224-6030-000 Compucentric stage 348224-6029-000 Stage registration 348224-6007-000 Stage scan pattern 348224-6014-000 RS 232 Remote control 348224-6058-000 Drift correction 498-237 USB Dongle for drift correction 348224-6080-000 Fish-eye mode 347823-9117-100 X-ray & external scan input panel kit C/w REMCON 346033-9220-000 ACD4 Board 346023-8012-000 Additional 24" flat panel TFT colour display monitor 346000-8026-010 Quiet mode 345596-0000-000 Compressor 345980-9023-000 Chiller aircooled 354752-9836-000 Specimen preparation kit. ZEISS Merlin FEG Scanning electron microscope (SEM), 2013 vintage.

APPLIED MATERIALS: VeritySem 4i CD SEM, 12" Dry Pump: MU100X (KASHIYAMA) 2011 vintage.

APPLIED MATERIALS Verity+ II CD SEM, 12" 3 Pots.

APPLIED MATERIALS VeritySEM 3 CD SEM, 8" and 12" Install type: stand-alone Cassette interface: (3) TDK FOUP load ports Status lamp (R, Y, G, audible) System software: ver 14.3.2.P1 User interface: User station Computer Flat panel monitor Keyboard/Mouse Power requirements: 208 VAC, 3 phase 2006 vintage.

APPLIED MATERIALS / OPAL 7830i APPLIED MATERIALS / OPAL 7830i Scanning electron microscope, parts machine.

APPLIED MATERIALS VeraSEM 3D Scanning electron microscope (SEM), 8" HEPA system: not included 2001 vintage.

APPLIED MATERIALS Verity Review SEM, 12" 2005 vintage.

APPLIED MATERIALS VeritySEM 2 Critical dimension (CD) measurement system.

APPLIED MATERIALS VeritySEM 2 Critical dimension (CD) measurement system, 12" Software version: 14.3.2.P1 Loader configuration: (3) Loaders System power rating: 208V AC, 3phase Can be inspected Currently installed 2006 vintage.

APPLIED MATERIALS G6 450 Defect review scanning electron microscope 2013 vintage.

APPLIED MATERIALS Verity Scanning electron microscope (SEM) CDSEM (BEOL) With FIB.

APPLIED MATERIALS NanoSem 3D CD SEM metrology system Set up to inspect 6"X6"X.25" reticles Specifications: Optical Microscope Lens Standing Operator Console Host Communication SECSII-GEM/HSMS System Options include 3D Metrology, Contac Hole Profile Grade, and Defect Review Application NANO3D Manuals Retrofit for Reticle Capability Automated Ports -Automatic Reticle Pod Handler Platform Type - Reticle DC System Wafer Shape - Reticle Shape Square 2002 vintage.

APPLIED MATERIALS VeraSem CD-SEM systems.

APPLIED MATERIALS VeritySEM 3 Critical dimension (CD) measurement system, 12" Software version: 14.3.2 Loader configuration: (3) Loaders System power rating: 120 VAC, 3 Phase Can be inspected Currently installed 2007 vintage.

APPLIED MATERIALS VeraSem CD-Scanning electron microscope (SEM), 12" 2002 vintage.

APPLIED MATERIALS SemVision CX Scanning electron microscope, 8".

APPLIED MATERIALS VeritySEM CD SEM, 8" and 12" (1) 12" FOUP Loader (2) 8" SMIF Loaders Dry pumps: (1) Edwards IQDP80, (1) Edwards IQDP40 Controller Electrical box 2004 vintage.

APPLIED MATERIALS VeraSEM System, 12".

APPLIED MATERIALS VeritySEM Scanning electron Microscope (SEM), 8" Process: Metrology AC power rack and pumps not included 2005 vintage.

APPLIED MATERIALS VeritySEM Scanning electron microscope (SEM), 8" Process: Metrology Dry pump : EBARA ESR20N 2EA Missing part: AC Power rack 2005 vintage.